铂悦仪器（上海）有限公司广州办

SPI-Module 溅射/碳镀膜机

SPI-Module™Sputter/Carbon Coater System™

The all-in-one sample prep for your SEM

SPI Module™ Sputter/Carbon Coater Systems™

SPI Module™溅射/碳镀机

The SPI Supplies Sputter/Carbon coating system allows the flexibility to choose between carbon evaporation and metal sputtering, all in the same system.

SPI Supplies的溅射/碳镀机实现碳蒸发及金属溅射的灵活选择，整合到一个系统中。

Features:

• Ability to evaporate carbon from either rods or fiber

能从碳棒或碳纤维中蒸发碳

• Sputters precious metals

溅射贵金属

• Both sputter and carbon units utilize the same vacuum base

溅射及碳单元使用同一真空基座

• Stackable design minimizes the amount of table space required

堆叠设计减少工作台的空间要求

• Quartz crystal thickness monitor available

石英晶体层监控器可选

• Water cooled base

水冷却基座

• Adjustable stage height

  可调节的样品台高度

• Simple to set up and use

  安装、使用简单

System Specifications:

系统规格：

• Available in a wide variety of configurations

  多重配置可选

• 4″ Diameter × 6″ high Pyrex chamber

Pyrex（派热克斯玻璃）腔：直径4″×高6″

• Size:

Vacuum base: 19″ W × 13″ D × 10″ H(48 cm W × 33 cm D × 25 cm H)

真空基座：19″ W × 13″ D × 10″ H(48 cm W × 33 cm D × 25 cm H)

Sputter / Carbon Modules: 10″ W × 13″ D × 6″ H(25 cm W × 33 cm D × 15 cm H)

溅射/碳镀模块：10″ W × 13″ D × 6″ H(25 cm W × 33 cm D × 15 cm H)

System Includes:

系统包括：

• Vacuum base with Sputter and/or Carbon module

真空基座，带溅射及/或碳镀膜模块

• Stainless steel vacuum hose

不锈钢真空管

• Sputter module includes a sputter head and gold target

溅射模块包括一个溅射头及金靶

• Carbon module includes a carbon fiber evaporation head

碳镀膜模块包括一个碳纤维蒸发头

Site Requirements:

场地需求：

• Vacuum pump capable of at least 2.1 ft³/min

真空泵，2.1 ft³/min

• Electrical Power: 110 V or 220V, 50/60 Hz

电源：110 V or 220V, 50/60 Hz

• High purity argon gas cylinder and regulator (recommended, for sputtering)

高纯度氩气罐及校准器（推荐，用于溅镀）

Option #1: Carbon Coater System碳镀膜机体系

Includes:

• Vacuum Control Base

• Carbon Coater Module With Carbon Fiber Head

包括：

•真空控制基座

•碳镀膜机模块（可选碳棒头）

Option #2: Sputter Coater System溅射镀膜机体系

Precious Metal Coating (e.g. gold coating)

贵金属镀膜(如镀金)

Includes:

• Vacuum Control Base

• Sputter Coater Module

包括：

•真空控制基座

•溅射镀膜机模块

Option #3:

Combination Sputter/Carbon Coater System组合型溅射/碳镀膜机体系

“The Works” Includes:

• Vacuum Control Base

• Sputter Coater Module

• Carbon Coater Module /With Carbon Fiber Head

• Optional: Carbon Rod Head

“组合型”包括：

• 真空控制基座
• 溅射镀膜机模块
• 碳镀膜机模块/带碳纤维头
• 可选碳棒头